Compact 3D-MEMS-meander monopole antenna

Author

Huang, C.-U. ; Chen, I.-Y. ; Chen, H.J.H. ; Jou, C.F. ; Huang, S.R.-S.

Author_Institution

Inst. of Electron. Eng., Nat. Tsing Hua Univ., Hsinchu, Taiwan

Volume

41

Issue

21

fYear

2005

Firstpage

1149

Lastpage

1151

Abstract

A MEMS meander monopole antenna is fabricated in the form of a folded microstrip on the upper and bottom surfaces of the substrate. This design is based on the meander line principle with a three-dimensional structure to achieve reduced size compared to many other small size printed antennas. The MEMS technologies, such as excimer laser drilling and copper electroplating were used in the fabrication of this antenna. This antenna can be mounted on the silicon wafer by anodic bonding technology. The design features 2.45 GHz operating frequency with 190 MHz bandwidth for WLAN applications. The geometric length of the antenna is 21 mm, and the width is 4 mm. Measured results have good agreement with simulation data.

Keywords

UHF antennas; electroplating; laser beam machining; micromechanical devices; microstrip antennas; monopole antennas; 190 MHz; 2.45 GHz; 21 mm; 4 mm; MEMS technologies; anodic bonding technology; antenna fabrication; compact 3D MEMS meander monopole antenna; copper electroplating; excimer laser drilling; folded microstrip; meander line principle; silicon wafer;

fLanguage

English

Journal_Title

Electronics Letters

Publisher

iet

ISSN

0013-5194

Type

jour

DOI

10.1049/el:20052677

Filename

1522002