Title :
A study of quantum interference fluctuations in deep sub-μm MOSFET´s under cryogenic conditions
Author :
Ohata, Akiko ; Toriumi, Akira ; Koga, Junji
Author_Institution :
ULSI Res. Lab., Toshiba Corp., Kawasaki, Japan
fDate :
11/1/1994 12:00:00 AM
Abstract :
We investigated the phase coherence length, lφ, in large Si-MOSFET´s fabricated using current process technology, with a particular emphasis on highly doped silicon substrates, and then studied the effects of quantum conductance fluctuations in deep sub-μm MOSFET´s, with channel length comparable to lφ. We identified, in a 0.2 μm MOSFET, universal conductance fluctuations in the strong inversion regime and conductance fluctuations due to variable range hopping in the weak inversion regime. The drain bias dependence of these fluctuations indicates clearly that they become a serious concern only at drain voltages lower than 10 mV. Therefore, even if the wave nature of electrons results in quantum conductance fluctuations, it will not lead to a limitation on device miniaturization in future Si-ULSI´s
Keywords :
MOSFET; cryogenic electronics; current fluctuations; elemental semiconductors; hopping conduction; inversion layers; quantum interference devices; silicon; 0.2 micron; 10 mV; Si; ULSI; channel length; cryogenic conditions; deep sub-micron MOSFETs; drain bias dependence; drain voltages; phase coherence length; quantum conductance fluctuations; quantum interference fluctuations; strong inversion regime; variable range hopping; weak inversion regime; Conductivity; Cryogenics; Electrons; Fluctuations; Impurities; Interference; MOSFET circuits; Magnetic field measurement; Magnetic fields; Scattering parameters;
Journal_Title :
Electron Devices, IEEE Transactions on