Title :
Low-Loss Patterned Ground Shield Interconnect Transmission Lines in Advanced IC Processes
Author :
Tiemeijer, Luuk F. ; Pijper, Ralf M T ; Havens, Ramon J. ; Hubert, Olivier
Author_Institution :
Res. Dept., NXP Semicond., Eindhoven
fDate :
3/1/2007 12:00:00 AM
Abstract :
In this paper, we provide an extensive experimental and theoretical study of the benefits of patterned ground shield interconnect transmission lines over more conventional layouts in advanced integrated-circuit processes. As part of this experimental work, we present the first comparative study taken on truly differential transmission line test structures. Our experimental results obtained on transmission lines with patterned ground shields are compared against a predictive compact equivalent-circuit model. This model employs exact closed-form expressions for the inductances, and describes key performance figures such as characteristic impedance and attenuation loss with excellent accuracy
Keywords :
electromagnetic shielding; equivalent circuits; integrated circuit interconnections; integrated circuit layout; transmission lines; advanced integrated circuit process; attenuation loss; characteristic impedance; differential transmission line test structures; equivalent-circuit model; on-wafer microwave measurements; patterned ground shield interconnect transmission lines; Coplanar transmission lines; Coplanar waveguides; Dielectric losses; Distributed parameter circuits; Inductance; Integrated circuit interconnections; Power transmission lines; Propagation losses; Transmission line theory; Transmission lines; Calibration; deembedding; integrated circuits (ICs); on-chip interconnect transmission lines; on-wafer micro wave measurements;
Journal_Title :
Microwave Theory and Techniques, IEEE Transactions on
DOI :
10.1109/TMTT.2007.891691
