Title :
Effects of nitrogen content on the microstructure and magnetic properties of FeTaN films
Author :
Lin, Jiang-Ching ; Chen, Lih-Juann ; Chen, Chi-Jen
Author_Institution :
Dept. of Mater. Sci. & Eng., Nat. Tsing Hua Univ., Hsinchu, Taiwan
fDate :
11/1/1994 12:00:00 AM
Abstract :
Microstructures and soft magnetic properties of FeTaN films with various nitrogen contents have been investigated. When the nitrogen flow ratio of sputtering gas is low, characteristics of low permeability and high coercivity are ascribed to the abnormal grain growth of a α-Fe. On the other hand, the formation of a ε-Fe2-3N phase due to the presence of higher nitrogen content also caused deterioration of soft magnetic properties. A permeability value higher than 7500 was obtained for films with homogeneous microstructure and appropriate crystal size by critical control of nitrogen content
Keywords :
coercive force; crystal microstructure; ferromagnetic materials; iron alloys; magnetic flux; magnetic heads; magnetic permeability; magnetic thin film devices; magnetic thin films; soft magnetic materials; sputter deposition; tantalum alloys; FeTaN; FeTaN films; coercivity; crystal size; flux density; homogeneous microstructure; magnetic recording heads; magnetic thin films; nitrogen flow ratio; permeability; soft magnetic properties; sputtering gas; Annealing; Coercive force; Magnetic films; Magnetic materials; Magnetic properties; Microstructure; Nitrogen; Permeability; Soft magnetic materials; Sputtering;
Journal_Title :
Magnetics, IEEE Transactions on
