Title :
NiAl underlayers for CoCrTa magnetic thin films
Author :
Lee, Li-Lien ; Laughlin, David E. ; Lambeth, David N.
Author_Institution :
Dept. of Mater. Sci. & Eng., Carnegie Mellon Univ., Pittsburgh, PA, USA
fDate :
11/1/1994 12:00:00 AM
Abstract :
CoCrTa films were sputter-deposited on either NiAl or Cr underlayers on glass substrates and their coercivities were compared. The NiAl film was found have the B2 structure with a lattice parameter of ~0.288 nm. The grain size of a 100 nm NiAl film is ~15 nm, which is about 50% smaller than a similarly deposited Cr film. As for the CoCrTa/Cr films the CoCrTa/NiAl films show a similar increase of the in-plane coercivity with thickening of the underlayer. X-ray diffraction studies showed that CoCrTa/NiAl films have a stronger (101¯0) peak than CoCrTa/Cr films. Substrate heating and biasing during deposition of the NiAl underlayer are less helpful than in the case of Cr underlayer
Keywords :
X-ray diffraction; aluminium alloys; chromium; chromium alloys; cobalt alloys; coercive force; ferromagnetic materials; grain size; lattice constants; magnetic disc storage; magnetic thin film devices; magnetic thin films; nickel alloys; sputter deposition; tantalum alloys; 15 nm; CoCrTa-Cr; CoCrTa-NiAl; CoCrTa/Cr films; CoCrTa/NiAl; X-ray diffraction studies; grain size; in-plane coercivity; lattice parameter; magnetic disk storage; sputter deposition; substrate heating; Chromium alloys; Cobalt alloys; Coercive force; Glass; Grain size; Lattices; Magnetic films; Microstructure; Sputtering; Substrates;
Journal_Title :
Magnetics, IEEE Transactions on
