Title :
Deposition of garnet thin films by metallo-organic decomposition (MOD)
Author :
Azevedo, A. ; Bharthulwar, S. ; Eppler, W.R. ; Kryder, M.H.
Author_Institution :
Data Storage Syst. Center, Carnegie Mellon Univ., Pittsburgh, PA, USA
fDate :
11/1/1994 12:00:00 AM
Abstract :
Polycrystalline Dy1.6Bi1.4Fe(5-x)FeGaxO 12 and Gd2BiFe(5-x)GaxO12 garnet thin films have been deposited on glass substrates by metallo-organic decomposition. The advantages of this process include low cost and accurate control of composition. The crystalline garnet phase was ascertained by X-ray diffractometry and the composition was measured by X-ray flourescence. The magnetic and magneto-optic properties were characterized using a magneto-optic loop tracer
Keywords :
X-ray diffraction; X-ray fluorescence analysis; bismuth compounds; chemical vapour deposition; dysprosium compounds; gadolinium compounds; garnets; magnetic thin films; magneto-optical effects; DyBiGG; DyBiGa5O12; Gd2BiFe(5-x)GaxO12 garnet thin films; GdBiFe5O12Ga5O12; GdBiIGGG; X-ray diffractometry; X-ray flourescence; composition; crystalline garnet phase; deposition; garnet thin films; glass substrates; low cost; magnetic properties; magneto-optic loop tracer; magneto-optic properties; metallo-organic decomposition; polycrystalline Dy1.6Bi1.4Fe(5-x)FeGaxO 12; Amorphous magnetic materials; Atomic measurements; Bismuth; Data storage systems; Dielectric substrates; Garnet films; Glass; Optical films; Solvents; Sputtering;
Journal_Title :
Magnetics, IEEE Transactions on
