DocumentCode
1200348
Title
DC biased capacitance method for measuring thin film magnetostriction and ΔE effect
Author
Lee, Y.H. ; Shin, Y.D. ; Herr, P.H. ; Lee, K.H. ; Kim, H.J. ; Han, S.H. ; Kang, I.K. ; Rhee, J.R.
Author_Institution
Phys. Dept., Jeonbuk Nat. Univ., Jeonju, South Korea
Volume
30
Issue
6
fYear
1994
fDate
11/1/1994 12:00:00 AM
Firstpage
4566
Lastpage
4568
Abstract
This paper reports a method for measuring magnetostriction, Young´s modulus of a substrate or film, and the ΔE effect with one apparatus. A substrate with a thin magnetic film deposited on it is in parallel with and cantilevered above a metal plate electrode, and they form a capacitive cell. The cantilever deflects due to its own weight and applied electric and magnetic fields. The small change of capacitance caused by this deflection is measured by a sensitive capacitance bridge. Young´s modulus, magnetostriction, and ΔE effect can be calculated by a theoretical analysis with the measured deflection data
Keywords
Young´s modulus; magnetic thin films; magnetic variables measurement; magnetostriction; ΔE effect; DC biased capacitance; Young´s modulus; capacitance bridge; magnetostriction; substrate; thin film; Bridge circuits; Capacitance measurement; Glass; Magnetic field measurement; Magnetic fields; Magnetic films; Magnetostriction; Substrates; Transistors; Voltage;
fLanguage
English
Journal_Title
Magnetics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9464
Type
jour
DOI
10.1109/20.334150
Filename
334150
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