Title :
Silicon micromachined two-dimensional galvano optical scanner
Author :
Asada, N. ; Matsuki, H. ; Minami, K. ; Esashi, M.
Author_Institution :
Tohoku Gakuin Univ., Sendai, Japan
fDate :
11/1/1994 12:00:00 AM
Abstract :
A new two-dimensional galvano optical scanner realized by silicon micromachining is proposed. To realize two-dimensional operation a silicon micromachined gimbal structure was introduced. It is possible to sense rotational angle using electromagnetic coupling between driving coil and fixed detecting coil
Keywords :
angular measurement; coils; elemental semiconductors; magneto-optical devices; micromachining; optical scanners; semiconductor technology; silicon; Si; Si micromachined optical scanner; driving coil; electromagnetic coupling; fixed detecting coil; micromachined gimbal structure; rotational angle; two-dimensional galvano optical scanner; Coils; Detectors; Electromagnetic forces; Lorentz covariance; Magnets; Micromachining; Mirrors; Optical device fabrication; Optical sensors; Silicon;
Journal_Title :
Magnetics, IEEE Transactions on
