DocumentCode
1203010
Title
An IC Piezoresistive Pressure Sensor for Biomedical Instrumentation
Author
Samaun ; Wise, Kensall D. ; Angell, James B.
Issue
2
fYear
1973
fDate
3/1/1973 12:00:00 AM
Firstpage
101
Lastpage
109
Abstract
A thin-diaphragm piezoresistive pressure sensor for biomedical instrumentation has been developed using monolithic integratedcircuit (IC) techniques. The piezoresistive effect has been chosen for this device because it provides an observable resistance change that is a linear function of pressure and is observable at low stress levels. A diaphragm is used as a stress magnifying device; its magnification is proportional to the square of the ratio of the diaphragm diameter to its thickness. The pressure-induced stresses in the diaphragm are sensed by properly oriented piezoresistors interconnected to form a bridge.
Keywords
Biomedical measurements; Biosensors; Bridge circuits; Catheters; Etching; Piezoresistance; Piezoresistive devices; Silicon; Stress; Wire; Animals; Biomedical Engineering; Blood Pressure Determination; Catheterization; Dogs; Electronics, Medical; Temperature;
fLanguage
English
Journal_Title
Biomedical Engineering, IEEE Transactions on
Publisher
ieee
ISSN
0018-9294
Type
jour
DOI
10.1109/TBME.1973.324170
Filename
4120604
Link To Document