Title :
Prolog to Semiconductor Piezoresistance for Microsystems
Author :
Donnell, Richard Ó
fDate :
3/1/2009 12:00:00 AM
Abstract :
This is an introduction to the above titled paper.
Keywords :
Epitaxial growth; Ion implantation; Piezoelectricity; Piezoresistance; Piezoresistive devices; Substrates; Temperature sensors;
Journal_Title :
Proceedings of the IEEE
DOI :
10.1109/JPROC.2008.2011941
