Title :
Two-dimensional multiwavelength surface emitting laser arrays fabricated by nonplanar MOCVD
Author :
Koyama, Fumio ; Mukaihara, Toshikazu ; Hayashi, Yasuhiro ; Ohnoki, N. ; Hatori, Nobuaki ; Iga, Kenichi
Author_Institution :
P&I Lab., Tokyo Inst. of Technol.
fDate :
11/10/1994 12:00:00 AM
Abstract :
The authors demonstrate two dimensional multiwavelength vertical cavity surface emitting laser (VCSEL) arrays fabricated by using nonplanar metal organic chemical vapour deposition (MOCVD). The resonance wavelength of GaInAs/GaAs VCSELs grown on a patterned substrate is successfully controlled in the wavelength range over 45 nm on wafer. The threshold of multiwavelength VCSELs formed on the patterned substrate is as low as 3 mA
Keywords :
III-V semiconductors; gallium arsenide; indium compounds; laser cavity resonators; optical fabrication; semiconductor growth; semiconductor laser arrays; surface emitting lasers; vapour phase epitaxial growth; 3 mA; GaInAs-GaAs; VCSEL arrays; chemical vapour deposition; metal organic CVD; multiwavelength type; nonplanar MOCVD; patterned substrate; resonance wavelength; surface emitting laser arrays; threshold current; two-dimensional arrays; vertical cavity;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19941305
