Title :
3-D photonic-crystal heterostructures: fabrication and in-line resonator
Author :
Kawakami, S. ; Sato, T. ; Miura, K. ; Ohtera, Y. ; Kawashima, T. ; Ohkubo, H.
Author_Institution :
NICHe, Tohoku Univ., Sendai, Japan
fDate :
6/1/2003 12:00:00 AM
Abstract :
A heterostructured photonic-crystal functional chip consisting of a resonator and waveguides is fabricated by a simple "autocloning" process. First, we prepare a substrate with different corrugation patterns by electron beam lithography and dry etching, and Ta/sub 2/O/sub 5/-SiO/sub 2/ multilayers are successively formed upon the substrate. An in-line resonator is fabricated and characterized by fiber-in-fiber-out measurement, and a resonance peak with Q=270 is demonstrated. The future outlook for the technology is also discussed.
Keywords :
electron beam lithography; optical fabrication; optical fibre couplers; optical multilayers; optical planar waveguides; optical resonators; photonic crystals; silicon compounds; sputter etching; substrates; tantalum compounds; 3-D photonic-crystal heterostructures; Ta/sub 2/O/sub 5/-SiO/sub 2/; Ta/sub 2/O/sub 5/-SiO/sub 2/ multilayers; autocloning process; corrugation patterns; dry etching; electron beam lithography; fabrication; fiber-in-fiber-out measurement; heterostructured photonic-crystal functional chip; in-line resonator; resonance peak; resonator; single-mode fiber; substrate; waveguides; Fabrication; Optical fiber polarization; Optical fibers; Optical resonators; Optical waveguides; Photonic band gap; Photonic crystals; Scanning electron microscopy; Shape; Slabs;
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2003.811334
