DocumentCode
1207332
Title
Single-chip surface micromachined integrated gyroscope with 50°/h Allan deviation
Author
Geen, John A. ; Sherman, Steven J. ; Chang, John F. ; Lewis, Stephen R.
Author_Institution
Micromachine Products Div., Analog Devices Inc., Cambridge, MA, USA
Volume
37
Issue
12
fYear
2002
fDate
12/1/2002 12:00:00 AM
Firstpage
1860
Lastpage
1866
Abstract
The design principles of a mass-produced surface micromachined gyroscope are described. The device is integrated on a single 3 mm×3 mm chip with a 3-μm BiCMOS process. It has a 4-μm-thick polysilicon structure, 5-V 6-mA supply, 12.5-mV/°/S sensitivity, 10 000:1 dynamic range, 30 000-gee shock survival, and -55°C to +85°C operating temperature.
Keywords
BiCMOS analogue integrated circuits; elemental semiconductors; gyroscopes; micromachining; micromechanical devices; silicon; -55 to 85 degC; 3 micron; 4 micron; 5 V; 6 mA; Allan deviation; BiCMOS analog circuits; Si; dynamic range; gyroscope; microelectromechanical systems; operating temperature; polysilicon structure; sensitivity; shock survival; surface micromachining; translinear loops; Acceleration; Accelerometers; BiCMOS integrated circuits; Displacement measurement; Force measurement; Gyroscopes; Impedance; Resonant frequency; Signal resolution; Substrates;
fLanguage
English
Journal_Title
Solid-State Circuits, IEEE Journal of
Publisher
ieee
ISSN
0018-9200
Type
jour
DOI
10.1109/JSSC.2002.804345
Filename
1088117
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