Title :
Sputtering preparation of ferroelectric PLZT thin films and their optical applications
Author :
Adachi, Hideaki ; Wasa, Kiyotaka
Author_Institution :
Matsushita Electr. Ind. Co. Ltd., Osaka, Japan
Abstract :
Preparation of epitaxial PLZT thin films on sapphire has been investigated, and excellent ferroelectric properties such as piezoelectricity and electrooptic effect with high transparency were obtained in thin films. Moreover, a preparation process was developed involving the multitarget sputtering method, and strict control of film composition and epitaxial growth with the buffer layer of graded composition were performed. Using these PLZT thin films, some optical applications, including an acoustooptic deflector and an electrooptic guided-light switch, are shown.<>
Keywords :
acousto-optical devices; electro-optical devices; electro-optical effects; epitaxial layers; ferroelectric materials; ferroelectric thin films; lanthanum compounds; lead compounds; optical deflectors; optical films; optical switches; piezoelectric thin films; sputter deposition; sputtered coatings; transparency; vapour phase epitaxial growth; Al/sub 2/O/sub 3/; PbLaZrO3TiO3; acoustooptic deflector; buffer layer; electrooptic effect; electrooptic guided-light switch; epitaxial PLZT thin films; ferroelectric PLZT thin films; film composition; graded composition; high transparency; multitarget sputtering method; optical applications; piezoelectricity; sapphire; sputtering preparation; Buffer layers; Electrooptic effects; Epitaxial growth; Ferroelectric films; Ferroelectric materials; Optical buffering; Optical films; Piezoelectric films; Piezoelectricity; Sputtering;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
