• DocumentCode
    1208608
  • Title

    Static buckling and actuation of free-standing mesoscale beams

  • Author

    Carr, Stephen M. ; Lawrence, Walter E. ; Wybourne, Martin N.

  • Author_Institution
    Dept. of Phys. & Astron., Dartmouth Coll., Hanover, NH, USA
  • Volume
    4
  • Issue
    6
  • fYear
    2005
  • Firstpage
    655
  • Lastpage
    659
  • Abstract
    We discuss the static buckling and actuation of free-standing mesoscopic beams. As the length-to-width aspect ratio of the beams is increased, the buckled shapes become more complex. Mechanical actuation confirms that the complex shapes are stable equilibria and that metastable equilibria also exist. This is consistent with a nonlinear elastic continuum model, which incorporates asymmetry in higher order buckling modes. Preliminary results indicate that, in addition to purely mechanical actuation, electromechanical mode-mode transitions can be induced by utilizing fabricated electrodes.
  • Keywords
    actuators; beams (structures); buckling; continuum mechanics; elasticity; electromechanical effects; nanotechnology; stress effects; buckled shapes; buckling modes; electromechanical mode-mode transitions; fabricated electrodes; free-standing mesoscale beams; mechanical actuation; metastable equilibria; microelectromechanical devices; nanoelectromechanical systems; nonlinear elastic continuum model; static buckling; strain; Astronomy; Capacitive sensors; Equations; Etching; Fabrication; Nanoelectromechanical systems; Nanoscale devices; Physics; Shape; Silicon; Buckling; electromechanical effects; mesoscopic physics; microelectromechanical devices; nanoelectromechanical systems (NEMS); strain;
  • fLanguage
    English
  • Journal_Title
    Nanotechnology, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    1536-125X
  • Type

    jour

  • DOI
    10.1109/TNANO.2005.858605
  • Filename
    1528468