DocumentCode
1210807
Title
Fabrication technology for microengineering
Author
Lawes, R.A.
Author_Institution
Rutherford Appleton Lab., Chilton, UK
Volume
3
Issue
6
fYear
1994
fDate
12/1/1994 12:00:00 AM
Firstpage
263
Lastpage
269
Abstract
This article reviews some of the more important technologies used for fabricating microcomponents and systems-bulk silicon micromachining, surface micromachining and LIGA, a process for forming deep microstructures by lithography, electroforming and moulding. The relative merits of using synchrotron, electron beam and excimer laser irradiation are discussed. A comb actuator and an electrostatic motor are given as examples of micromachined components
Keywords
electroforming; electron beam machining; electrostatic devices; laser beam machining; lithography; microactuators; micromachining; micromotors; synchrotron radiation; LIGA; bulk silicon micromachining; comb actuator; deep microstructures; electroforming; electron beam irradiation; electrostatic motor; excimer laser irradiation; fabrication technology; lithography; microcomponents; microengineering; moulding; surface micromachining; synchrotron irradiation;
fLanguage
English
Journal_Title
Engineering Science and Education Journal
Publisher
iet
ISSN
0963-7346
Type
jour
DOI
10.1049/esej:19940605
Filename
338509
Link To Document