Title :
Fabrication technology for microengineering
Author_Institution :
Rutherford Appleton Lab., Chilton, UK
fDate :
12/1/1994 12:00:00 AM
Abstract :
This article reviews some of the more important technologies used for fabricating microcomponents and systems-bulk silicon micromachining, surface micromachining and LIGA, a process for forming deep microstructures by lithography, electroforming and moulding. The relative merits of using synchrotron, electron beam and excimer laser irradiation are discussed. A comb actuator and an electrostatic motor are given as examples of micromachined components
Keywords :
electroforming; electron beam machining; electrostatic devices; laser beam machining; lithography; microactuators; micromachining; micromotors; synchrotron radiation; LIGA; bulk silicon micromachining; comb actuator; deep microstructures; electroforming; electron beam irradiation; electrostatic motor; excimer laser irradiation; fabrication technology; lithography; microcomponents; microengineering; moulding; surface micromachining; synchrotron irradiation;
Journal_Title :
Engineering Science and Education Journal
DOI :
10.1049/esej:19940605
