DocumentCode
1211157
Title
Parameters extraction and modeling for planar spiral inductor on Si-SiO2 substrates by DDM for conformal modules
Author
Zhao, Ji-Xiang ; Mao, Jun-Fa
Author_Institution
Dept. of Electron. Eng., Shanghai Jiao Tong Univ., China
Volume
51
Issue
6
fYear
2003
fDate
6/1/2003 12:00:00 AM
Firstpage
1763
Lastpage
1766
Abstract
In this paper, the domain decomposition method (DDM) for conformal modules is used to get simple analytic expressions for parameters of planar spiral inductors on Si-SiO2 substrates. The conductor and substrate losses are considered in the expressions. The quality factor of the spiral inductor is computed with a transmission-line mode and compared with previously published experimental results, showing that DDM model is accurate and efficient for modeling an on-chip spiral inductor on Si-SiO2 substrates.
Keywords
Q-factor; conformal mapping; inductors; microstrip lines; modules; parameter estimation; radiofrequency integrated circuits; silicon; silicon compounds; transmission line theory; DDM; RF circuits; Si; Si-SiO2; Si-SiO2 substrates; conductor losses; conformal modules; domain decomposition method; lossy Si substrate; microstrip structure; modeling; parameters extraction; planar spiral inductor; quality factor; substrate losses; transmission-line mode; Conductors; Dielectric substrates; Distributed decision making; Impedance; Inductors; Parameter extraction; Q factor; Spirals; Strips; Transmission lines;
fLanguage
English
Journal_Title
Microwave Theory and Techniques, IEEE Transactions on
Publisher
ieee
ISSN
0018-9480
Type
jour
DOI
10.1109/TMTT.2003.812581
Filename
1201811
Link To Document