Title :
Low-loss 2-bit tunable bandpass filters using MEMS DC contact switches
Author :
Pothier, Arnaud ; Orlianges, Jean-Christophe ; Zheng, Guizhen ; Champeaux, Corinne ; Catherinot, Alain ; Cros, Dominique ; Blondy, Pierre ; Papapolymerou, John
Author_Institution :
Res. Inst. in Opt. & Microwave Commun., Limoges, France
Abstract :
This paper presents the development of tunable filters using ohmic contact microelectromechanical system switches. It is shown that this type of switch is very well suited for the fabrication of low-loss high tuning-range microwave filters. Two sets of tunable Ku-band microstrip filters and resonators have been fabricated, with measured tuning ranges of 20% and 44%, and unloaded quality factors better than 75 in all cases. The 2-bit 5.7% fractional bandwidth, tunable bandpass filters exhibit insertion losses lower than 3.2 dB in all states.
Keywords :
Q-factor; band-pass filters; microstrip filters; microstrip resonators; microswitches; microwave filters; ohmic contacts; 3.2 dB; MEMS dc contact switches; insertion loss; low loss high tuning range microwave filters; low-loss 2-bit tunable bandpass filters; microstrip resonators; ohmic contact microelectromechanical system switches; quality factor; tunable Ku-band microstrip filters; Band pass filters; Fabrication; Microelectromechanical systems; Micromechanical devices; Microstrip filters; Microstrip resonators; Microwave filters; Ohmic contacts; Resonator filters; Switches;
Journal_Title :
Microwave Theory and Techniques, IEEE Transactions on
DOI :
10.1109/TMTT.2004.839935
