MMIC internal electric field mapping with submicrometre spatial resolution and gigahertz bandwidth by means of high frequency scanning force microscope testing

Author

Leyk, A. ; Kubalek, E.

Author_Institution

Fachgebiet Werkstoffe der Elektrotechnik, Gerhard-Mercator-Univ., Duisburg, Germany

Volume

31

Issue

24

fYear

1995

fDate

11/23/1995 12:00:00 AM

Firstpage

2089

Lastpage

2091

Abstract

High frequency scanning force microscope (HFSFM) testing enables, among other measurements, the probing of device internal electric potential distributions within monolithic microwave integrated circuits (MMICs) with both high spatial and temporal resolution. Two planar components of the electric field can be calculated from this data and their local distribution can be mapped. For the first time 2D distributions of electric field components on an interdigital capacitor within an MMIC at frequencies up to 6 GHz were evaluated from HFSFM potential measurements, demonstrating the submicrometre spatial resolution and gigahertz bandwidth of this new MMIC internal electric field mapping technique

Keywords

MMIC; atomic force microscopy; electric field measurement; integrated circuit testing; microwave measurement; 2D distributions; 6 GHz; HF scanning force microscope testing; MMIC internal electric field mapping; electric field components; electric potential distributions; gigahertz bandwidth; interdigital capacitor; local distribution mapping; monolithic microwave integrated circuits; submicron spatial resolution;

fLanguage

English

Journal_Title

Electronics Letters

Publisher

iet

ISSN

0013-5194

Type

jour

DOI

10.1049/el:19951442

Filename

480725