Title :
A novel approach to the synthesis of electrostatic lenses with minimized aberrations
Author :
Szép, Jenö ; Szilagyi, Miklos
Author_Institution :
Dept. of Electr. & Comput. Eng., Arizona Univ., Tucson, AZ, USA
fDate :
7/1/1988 12:00:00 AM
Abstract :
A novel approach to the synthesis of axially symmetric electrostatic lenses with minimum aberrations is presented. The method uses computer optimization to determine the electrode potentials of a multielectrode lens. The method can be used for designing lenses for many different applications. As a preliminary result, an example of a lens with very small spherical aberration is given. The synthesis of electrostatic lenses can be accomplished automatically with an experimental setup controlled by an online computer
Keywords :
electronic engineering computing; electrostatic lenses; optimisation; axially symmetric type; computer optimization; electrode potentials; electrostatic lenses; minimized aberrations; multielectrode lens; synthesis; Application software; Automatic control; Electrodes; Electron optics; Electrostatics; Lenses; Optical design; Optimization methods; Particle beam optics; Shape;
Journal_Title :
Electron Devices, IEEE Transactions on