• DocumentCode
    1212480
  • Title

    Mass sensitivity of dual mode SAW delay lines on AlN/sapphire structure

  • Author

    Xu, J. ; Hu, G. ; Auner, G.W. ; Ying, H.

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Wayne State Univ., Detroit, MI, USA
  • Volume
    41
  • Issue
    22
  • fYear
    2005
  • Firstpage
    1254
  • Lastpage
    1255
  • Abstract
    A surface acoustic wave (SAW) and a leaky shear horizontal SAW (SH-SAW) have been simultaneously excited along Al2O3[1 1~ 00] on an AlN(0001)/Al2O3(11 2~ 0) structure. Both modes are highly sensitive to surface mass loading. The measured mass sensitivities are in good agreement with theoretical prediction, and are comparable or higher than those reported on other SAW devices.
  • Keywords
    III-V semiconductors; aluminium compounds; mass measurement; piezoelectric materials; sapphire; sensitivity; surface acoustic wave delay lines; surface acoustic wave sensors; AlN-Al2O3; SH-SAW; dual mode SAW delay lines; leaky shear horizontal SAW; mass sensitivity; sapphire; surface acoustic wave; surface mass loading;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:20053193
  • Filename
    1528873
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1212480