Title :
Mass sensitivity of dual mode SAW delay lines on AlN/sapphire structure
Author :
Xu, J. ; Hu, G. ; Auner, G.W. ; Ying, H.
Author_Institution :
Dept. of Electr. & Comput. Eng., Wayne State Univ., Detroit, MI, USA
Abstract :
A surface acoustic wave (SAW) and a leaky shear horizontal SAW (SH-SAW) have been simultaneously excited along Al2O3[1 1~ 00] on an AlN(0001)/Al2O3(11 2~ 0) structure. Both modes are highly sensitive to surface mass loading. The measured mass sensitivities are in good agreement with theoretical prediction, and are comparable or higher than those reported on other SAW devices.
Keywords :
III-V semiconductors; aluminium compounds; mass measurement; piezoelectric materials; sapphire; sensitivity; surface acoustic wave delay lines; surface acoustic wave sensors; AlN-Al2O3; SH-SAW; dual mode SAW delay lines; leaky shear horizontal SAW; mass sensitivity; sapphire; surface acoustic wave; surface mass loading;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20053193
