Title :
Imprinted DOE on varifocal membrane lens
Author :
Phuong-Ha Cu-Nguyen ; Grewe, Adrian ; Sinzinger, Stefan ; Zappe, H. ; Seifert, Andreas
Author_Institution :
Dept. of Microsyst. Eng., Univ. of Freiburg, Freiburg, Germany
Abstract :
We present a highly compact, fully integrated tunable lens for confocal hyperspectral imaging with imprinted diffractive structures on a polydimethylsiloxane (PDMS) membrane. The PDMS membrane was patterned by replication technique with a diffractive optical element (DOE) on quartz glass as master mold. The smallest feature size is 0.8μm the membrane thickness is 100 μm. The liquid-filled lens is hydraulically driven by integrated magnetic actuation and serves as a tunable filter in the spectral range of 450-900 nm with a linewidth less than 18 nm over the entire tuning range.
Keywords :
diffractive optical elements; hyperspectral imaging; lenses; membranes; optical filters; optical tuning; polymers; replica techniques; SiO2; confocal hyperspectral imaging; fully integrated tunable lens; highly compact tunable lens; imprinted diffractive optical element; integrated magnetic actuation; liquid-filled lens; master mold; membrane thickness; polydimethylsiloxane membrane; quartz glass; replication technique; tunable filter; varifocal membrane lens; wavelength 450 nm to 900 nm; Dispersion; Glass; Lenses; Magnetic liquids; Optical diffraction; Optical imaging; Optical refraction;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2014 International Conference on
Conference_Location :
Glasgow
Print_ISBN :
978-0-9928-4140-9
DOI :
10.1109/OMN.2014.6924519
