Imprinted DOE on varifocal membrane lens

Author

Phuong-Ha Cu-Nguyen ; Grewe, Adrian ; Sinzinger, Stefan ; Zappe, H. ; Seifert, Andreas

Author_Institution

Dept. of Microsyst. Eng., Univ. of Freiburg, Freiburg, Germany

fYear

2014

fDate

17-21 Aug. 2014

Firstpage

21

Lastpage

22

Abstract

We present a highly compact, fully integrated tunable lens for confocal hyperspectral imaging with imprinted diffractive structures on a polydimethylsiloxane (PDMS) membrane. The PDMS membrane was patterned by replication technique with a diffractive optical element (DOE) on quartz glass as master mold. The smallest feature size is 0.8μm the membrane thickness is 100 μm. The liquid-filled lens is hydraulically driven by integrated magnetic actuation and serves as a tunable filter in the spectral range of 450-900 nm with a linewidth less than 18 nm over the entire tuning range.

Keywords

diffractive optical elements; hyperspectral imaging; lenses; membranes; optical filters; optical tuning; polymers; replica techniques; SiO₂; confocal hyperspectral imaging; fully integrated tunable lens; highly compact tunable lens; imprinted diffractive optical element; integrated magnetic actuation; liquid-filled lens; master mold; membrane thickness; polydimethylsiloxane membrane; quartz glass; replication technique; tunable filter; varifocal membrane lens; wavelength 450 nm to 900 nm; Dispersion; Glass; Lenses; Magnetic liquids; Optical diffraction; Optical imaging; Optical refraction;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Nanophotonics (OMN), 2014 International Conference on

Conference_Location

Glasgow

ISSN

2160-5033

Print_ISBN

978-0-9928-4140-9

Type

conf

DOI

10.1109/OMN.2014.6924519

Filename

6924519