Title :
MEMS-based X-ray optics for astronomy, planetary exploration, and earth observation
Author :
Ezoe, Yuichiro ; Ogawa, Tomomi ; Ikuta, Masahiro ; Sato, Mitsuhisa ; Mitsuda, Kazuhisa ; Yamaguchi, Hitoshi ; Kanamori, Yoshiaki ; Morishita, Kohei ; Nakajima, Kensuke ; Hiroshima, Hiroshi ; Maeda, Ryutaro
Author_Institution :
Tokyo Metropolitan Univ., Tokyo, Japan
Abstract :
We have been developing novel ultra lightweight X-ray optics based on MEMS technologies, aiming at future space missions whose objectives include X-ray astronomy, planetary exploration, and Earth observation. Sidewalls of DRIE- micro pores through thin silicon wafers are used for X-ray mirrors. Recently, we built a prototype of a 4-inch Wolter type-I optic and fabricated a 12-inch single-stage op-tic. In this paper, we review our development and future space applications.
Keywords :
X-ray optics; micromechanical devices; mirrors; space vehicles; DRIE-micropores; Earth observation; MEMS-based X-ray optics; Wolter type-I optic; X-ray astronomy; X-ray mirrors; future space missions; lightweight X-ray optics; planetary exploration; silicon wafers; single-stage optic; size 12 inch; size 4 inch; Earth; Micromechanical devices; Optical device fabrication; Optical imaging; Optical sensors; X-ray imaging; DRIE; X-ray optics; space application;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2014 International Conference on
Conference_Location :
Glasgow
Print_ISBN :
978-0-9928-4140-9
DOI :
10.1109/OMN.2014.6924553
