DocumentCode :
1213051
Title :
Interferometric determination of the diameter of a silicon sphere using a direct optical frequency tuning system
Author :
Kuramoto, Naoki ; Fujii, Kenichi
Author_Institution :
Nat. Metrol. Inst. of Japan/Nat. Inst. of Adv. Ind. Sci. & Technol., Ibaraki, Japan
Volume :
52
Issue :
2
fYear :
2003
fDate :
4/1/2003 12:00:00 AM
Firstpage :
631
Lastpage :
635
Abstract :
A new interferometer with a direct optical frequency tuning system using a phase-lock loop (PLL) offset locking has been developed to accurately measure the volumes of 1-kg single crystal silicon spheres. Three lasers are used in this system. The first one is an iodine-stabilized He-Ne laser, which is used as a reference laser. The second one is an offset-locked He-Ne laser whose optical frequency is offset-locked to the reference laser. The third one is an external cavity diode laser whose optical frequency is offset-locked to the offset-locked He-Ne laser by a PLL circuit. By changing the offset frequency between the diode laser and the offset-locked He-Ne laser, the optical frequency of the diode laser can be tuned continuously over a frequency range of 19 GHz and stabilized at a desired frequency with an uncertainty of 900 kHz within an integration time of 1/30 s. Accurate optical frequency changes in the diode laser produced by this system have been used to measure the sphere diameter by phase-shifting interferometry. Outlines of the interferometer and the frequency tuning system are presented. Preliminary results of the diameter measurement for a silicon sphere are also presented.
Keywords :
diameter measurement; optical tuning; phase locked loops; phase shifting interferometry; silicon; volume measurement; 1 kg; Si; diameter measurement; direct optical frequency tuning system; external cavity diode laser; iodine-stabilized He-Ne laser; phase-lock loop offset locking; phase-shifting interferometry; single crystal silicon sphere; volume measurement; Diode lasers; Frequency measurement; Laser tuning; Optical interferometry; Optical tuning; Phase locked loops; Phase measurement; Phase shifting interferometry; Silicon; Volume measurement;
fLanguage :
English
Journal_Title :
Instrumentation and Measurement, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9456
Type :
jour
DOI :
10.1109/TIM.2003.811683
Filename :
1202112
Link To Document :
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