A novel pressure sensor based on optofluidic micro-ring resonator

This paper demonstrates a novel optofluidic pressure sensor. Since optofluidics is becoming an emerging technology which combines the advantages of optics and microfluidics, it is used to bring new benefits to traditional pressure sensors. In this study, an external pressure causes deformation on a microring resonator which yields wavelength shift in the resonating. Whole structure is based on polydimethylsiloxane (PDMS) to ensure compatibility with microfluidic chips. Numerical simulations are performed to determine wavelength shift due to applied pressure. Maximum radial displacement of 2.5 μm is observed for an applied pressure of 25 kPa. A sensitivity of 2 nm/kPa is achieved.