Title :
Development of visored MEMS shutter array for cryogenic environment
Author :
Takahashi, Tatsuro ; Mita, M. ; Konishi, M. ; Motohara, K. ; Kobayashi, Nao ; Kashikawa, N. ; Fujita, Hideaki ; Toshiyoshi, Hiroshi
Author_Institution :
Univ. of Tokyo, Tokyo, Japan
Abstract :
We report the development of the visored shutter structure for astronomical instrument and the electrostatic operation in a 140K cryogenic environment without thermo-mechanical failure.
Keywords :
astronomical instruments; cryogenics; micro-optomechanical devices; optical arrays; astronomical instrument; cryogenic environment; visored MEMS shutter array; Arrays; Cryogenics; Electrostatics; Metals; Micromechanical devices; Nanophotonics; Substrates;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2014 International Conference on
Conference_Location :
Glasgow
Print_ISBN :
978-0-9928-4140-9
DOI :
10.1109/OMN.2014.6924564
