Title :
50μm gap 8×8 pixels deformable mirror fabricated by membrane transfer process
Author :
Wu, Tsai-Fu ; Sasaki, T. ; Akiyama, Masanori ; Hane, Kazuhiro
Author_Institution :
Dept. of Nanomech., Tohoku Univ., Sendai, Japan
Abstract :
We propose, design and fabricate here an electrostatically actuated continuous single-crystal-silicon membrane deformable mirror (DM) for astronomical observation. A 50μm air gap is generated a large between the mirror membrane and the electrode to get a large stroke. A DM with a 4mm×4mm mirror membrane and 8×8 underlying electrode array a is fabricated by combining Au-Si eutectic wafer bonding and the subsequent all-dry release process.
Keywords :
electrodes; elemental semiconductors; gold; membranes; mirrors; optical fabrication; silicon; wafer bonding; Au-Si; Au-Si eutectic wafer bonding; Si; air gap; all-dry release process; astronomical observation; electrode; electrode array; electrostatically actuated continuous single-crystal-silicon membrane deformable mirror; membrane transfer process; mirror membrane; Adaptive optics; Arrays; Biomembranes; Bonding; Electrodes; Mirrors;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2014 International Conference on
Conference_Location :
Glasgow
Print_ISBN :
978-0-9928-4140-9
DOI :
10.1109/OMN.2014.6924577
