Integration of the innovative 3D micro prism design and fabrication technology for a pico-projection system

Author

Kuo-Yung Hung ; Yun-Ju Chuang ; Yi-Wei Tsai ; Shih-Hao Huang ; Jheng-Huai Huang

Author_Institution

Dept. of Mech. Eng., Ming Chi Univ. of Technol., Taipei, Taiwan

fYear

2014

fDate

17-21 Aug. 2014

Firstpage

109

Lastpage

110

Abstract

In this study, micro-opto-electro-mechanical systems (MOEMS) technology was used to design an innovative and compact 10 × 6 × 1.5 mm) 3D micro prism, featuring three distinct 45° inclined optical surfaces that simplify the optical design and dimensions of the micro-projection system. The 3D micro-prism manufacturing process is based on a process involving three time inclined exposures and thickfilm (1.5 mm). The roughness of the inclined surface reached 29.8 nm, improving the 407-nm surface roughness yielded by computer numerical control (CNC) processing.

Keywords

micro-optics; micro-optomechanical devices; microfabrication; optical prisms; surface roughness; 45° inclined optical surfaces; computer numerical control processing; fabrication technology; inclined surface roughness; innovative 3D micro prism design; micro-opto-electro-mechanical systems; pico-projection system; thickfilm; time inclined exposures; Optical device fabrication; Optical interferometry; Optical reflection; Rough surfaces; Surface roughness; Surface treatment; Three-dimensional displays; MOEMS; Pico projector; Thickfilm;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Nanophotonics (OMN), 2014 International Conference on

Conference_Location

Glasgow

ISSN

2160-5033

Print_ISBN

978-0-9928-4140-9

Type

conf

DOI

10.1109/OMN.2014.6924579

Filename

6924579