MEMS-based high-Q Fabry-Perot filters

The design, fabrication, and characterization of a tunable in-plane MEMS-based Fabry-Perot (FP) filter with hybrid integration of the grating and slot structures are presented. Antireflection grating (ARG) is designed at the inner wall of the FP resonator to enhance the performance of a tunable FP filter. Attributed to the ARG structures, the light can be propagated effectively through the FP resonator. The experimental result shows a low driving voltage electrostatically tuned the device with a wide mechanical tuning range (more than 1600 nm with 4 V) and a high Q-factor (9762).