Monolithic integration of a glass membrane on silicon micro-actuator for micro-interferometry

Author

Lullin, Justine ; Bargiel, Sylwester ; Courjon, Emilie ; Perrin, Stephane ; Baranski, Marcin ; Passilly, Nicolas ; Gorecki, Christophe

Author_Institution

MN2S Dept., FEMTO-ST, Besancon, France

fYear

2014

fDate

17-21 Aug. 2014

Firstpage

87

Lastpage

88

Abstract

We report the monolithic integration of glass membranes on a highly structured SOI wafer of electrostatic comb-drive actuator. The integration method combines glass micromachining techniques and non-standard processing of SOI, based on spray coating and projection photolithography. Proposed solution overcomes several basic difficulties of monolithic glass integration. We demonstrate its potential by fabrication of 4×4 matrix of reference mirrors on very thin (25 μm) and large (φ=2 mm) light-transparent glass membranes, which is of great importance for MOEMS-based phase-shift micro-interferometry systems.

Keywords

light interferometry; micro-optomechanical devices; microactuators; micromachining; optical fabrication; optical glass; silicon; silicon-on-insulator; MOEMS-based phase-shift micro-interferometry; SOI wafer; Si; electrostatic comb-drive actuator; glass membrane; light-transparent glass membranes; microinterferometry; monolithic integration; projection photolithography; reference mirrors; silicon microactuator; spray coating; Actuators; Glass; Lithography; Optical device fabrication; Resists; Silicon; Ultrafast optics;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Nanophotonics (OMN), 2014 International Conference on

Conference_Location

Glasgow

ISSN

2160-5033

Print_ISBN

978-0-9928-4140-9

Type

conf

DOI

10.1109/OMN.2014.6924606

Filename

6924606