A biaxial piezoelectric MEMS scanning mirror and its application to pico-projectors

Author

Ikegami, Kenshin ; Koyama, Tomofumi ; Saito, Takashi ; Yasuda, Y. ; Toshiyoshi, Hiroshi

fYear

2014

fDate

17-21 Aug. 2014

Firstpage

95

Lastpage

96

Abstract

In this paper, we report a two-dimensional MEMS optical scanner that actuate and detect the angular motion through the piezoelectric effect of thin film PZT. Typical scan ranges were ±12° at 25 kHz for the horizontal resonance and ±8° at 60 Hz for the vertical non-resonance, and the overall power consumption was 100 mW or less. A newly designed mechanical rib structure on the backside of the mirror was found to suppress the dynamic deformation of the mirror to the level compatible with a high definition of 720 pixels or more. A scanning laser type pico-projector was developed for demonstration.

Keywords

deformation; micromirrors; optical projectors; optical scanners; piezoelectric devices; 2D MEMS optical scanner; biaxial piezoelectric MEMS scanning mirror; dynamic deformation; frequency 25 kHz; frequency 60 Hz; mechanical rib structure; power 100 mW; scanning laser type picoprojector; thin film PZT; Laser beams; Micromechanical devices; Mirrors; Optical feedback; Optical films; Optical imaging; Piezoelectric effect;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Nanophotonics (OMN), 2014 International Conference on

Conference_Location

Glasgow

ISSN

2160-5033

Print_ISBN

978-0-9928-4140-9

Type

conf

DOI

10.1109/OMN.2014.6924610

Filename

6924610