DocumentCode :
121363
Title :
Resonant PZT MEMS scanners with integrated angle sensors
Author :
Baran, Utku ; Holmstrom, Sture ; Brown, Dean ; Davis, Wyatt ; Cakmak, Onur ; Urey, Hakan
Author_Institution :
Koc Univ., Istanbul, Turkey
fYear :
2014
fDate :
17-21 Aug. 2014
Firstpage :
99
Lastpage :
100
Abstract :
Several high performing PZT-actuated MEMS laser scanners utilizing mechanical coupling are designed, fabricated, and characterized. Optical angles up to 59.3 deg. and θoptD·fn-products up to 3052 deg.·mm·Hz are demonstrated. These are the highest performing MEMS scanners in the literature. An angle sensor is integrated into one scanner design without any additional processing. The sensor response shows a linear relationship with the mirror rotation. A closed-loop drive was demonstrated using the scanner output.
Keywords :
angular measurement; lead compounds; micro-optics; micromechanical devices; optical scanners; MEMS laser scanners; PZT; PZT MEMS scanners; angle sensors; closed-loop drive; mechanical coupling; mirror rotation; Mechanical sensors; Micromechanical devices; Mirrors; Optical sensors; Resonant frequency; Sensor phenomena and characterization;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2014 International Conference on
Conference_Location :
Glasgow
ISSN :
2160-5033
Print_ISBN :
978-0-9928-4140-9
Type :
conf
DOI :
10.1109/OMN.2014.6924612
Filename :
6924612
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=121363
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