Title :
λ/8 Precision parabolic resonant varifocal mirror
Author :
Nakazawa, K. ; Sasaki, T. ; Hane, Kazuhiro
Author_Institution :
Tohoku Univ., Sendai, Japan
Abstract :
An λ/8 precision parabolic resonant varifocal mirror is described. The varifocal mirror is electrostatically driven and made of single crystalline silicon. The varifocal mirrors having two types of circumferential structure were fabricated. One is clamped edge, the other is close to simply supported edge. The mirror surface profiles were measured at maximum oscillation amplitude. The deviation from parabola is smaller than λ/8 in the case of the mirror with simply supported circumference at the wavelength longer than 500 nm.
Keywords :
elemental semiconductors; microfabrication; micromirrors; silicon; Si; circumferential structure; clamped edge structure; electrostatically driven varifocal mirror; maximum oscillation amplitude; mirror surface profiles; precision parabolic resonant varifocal mirror; single crystalline silicon; supported edge structure; Eigenvalues and eigenfunctions; Frequency measurement; Micromechanical devices; Mirrors; Optical device fabrication; Optical surface waves; Surface waves;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2014 International Conference on
Conference_Location :
Glasgow
Print_ISBN :
978-0-9928-4140-9
DOI :
10.1109/OMN.2014.6924613
