DocumentCode :
1213670
Title :
Investigation of a SiGe HBT during ESD stress in a 0.18-μm SiGe BiCMOS process
Author :
Shiao-Shien Chen ; Tung-Yang Chen ; Tien-Hao Tang ; Shao-Chang Huang ; Hsu, T.-L. ; Hua-Chou Tseng ; Jen-Kon Chen ; Chiu-Hsiang Chou
Author_Institution :
Device Eng. Dept., United Microelectron. Corp., Taiwan, Taiwan
Volume :
24
Issue :
3
fYear :
2003
fDate :
3/1/2003 12:00:00 AM
Firstpage :
168
Lastpage :
170
Abstract :
This paper investigates the electrostatic discharge (ESD) characteristics of the silicon-germanium heterojunction bipolar transistor (SiGe HBT) in a 0.18-μm SiGe BiCMOS process. According to this letter, the open base configuration in the SiGe HBT has lower trigger voltage and higher ESD robustness than a common base configuration. As compared to the gate-grounded NMOS and PMOS in a bulk CMOS process, the SiGe HBT has a higher ESD efficiency from the layout area point of view. Additionally, any trigger biases used to improve the ESD robustness of the SiGe HBT are observed as invalid, and even they can work successfully in bulk CMOS process.
Keywords :
BiCMOS integrated circuits; Ge-Si alloys; electrostatic discharge; heterojunction bipolar transistors; protection; semiconductor materials; 0.18 micron; 0.18-/spl mu/m SiGe BiCMOS process; ESD efficiency; ESD robustness; ESD stress; SiGe; SiGe HBT; common base configuration; electrostatic discharge characteristics; layout area; open base configuration; trigger voltage; BiCMOS integrated circuits; CMOS process; Electrostatic discharge; Germanium silicon alloys; Heterojunction bipolar transistors; MOS devices; Robustness; Silicon germanium; Stress; Voltage;
fLanguage :
English
Journal_Title :
Electron Device Letters, IEEE
Publisher :
ieee
ISSN :
0741-3106
Type :
jour
DOI :
10.1109/LED.2003.809534
Filename :
1202516
Link To Document :
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