DocumentCode
1214255
Title
Measurement of 5-eV atomic oxygen using carbon based films: preliminary results
Author
White, Carl B. ; Roberts, Graham T. ; Chambers, Alan R.
Author_Institution
Astronaut. Res. Group, Univ. of Southampton, UK
Volume
5
Issue
6
fYear
2005
Firstpage
1206
Lastpage
1213
Abstract
Carbon-based sensors have been developed to measure the atmospheric neutral atomic oxygen (AO) flux experienced by spacecraft in low Earth orbit. Thin- and thick-film carbon sensor elements were deposited onto an alumina substrate between thick-film gold tracks and silver palladium solder pads. AO flux is deduced by measuring resistance changes as the carbon film erodes and applying a simple theory. A wide range of responses were observed that are dependent on the deposition process and post deposition annealing. The deposition methods used were dc magnetron sputtering, e-beam evaporation, and screen-printing. The sensors tested compare favorably with similar silver-based sensors that have been flown previously on small satellite missions with significant mass/power constraints.
Keywords
annealing; carbon; gas sensors; oxygen; sputter deposition; thick films; thin films; 5 eV; alumina substrate; atmospheric neutral atomic oxygen flux; carbon-based films; carbon-based sensors; dc magnetron sputtering; deposition annealing; deposition process; e-beam evaporation; low Earth orbit; resistance measurement; satellite missions; screen printing; silver palladium solder pads; spacecraft; thick film gold tracks; Atmospheric measurements; Atomic layer deposition; Atomic measurements; Carbon; Electrical resistance measurement; Extraterrestrial measurements; Low earth orbit satellites; Magnetic sensors; Space vehicles; Thick film sensors; Atomic oxygen (AO); carbon; sensing; sensor;
fLanguage
English
Journal_Title
Sensors Journal, IEEE
Publisher
ieee
ISSN
1530-437X
Type
jour
DOI
10.1109/JSEN.2005.858973
Filename
1532258
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