Temperature variation mapping of a microelectromechanical system by thermoreflectance imaging

Author

Grauby, Stéphane ; Dilhaire, Stefan ; Jorez, Sébastien ; Claeys, Wilfrid

Author_Institution

CPMOH-Univ. Bordeaux, Talence, France

Volume

26

Issue

2

fYear

2005

Firstpage

78

Lastpage

80

Abstract

We present in this letter a cost effective noncontact imaging technique well adapted to measure the temperature variations on microelectromechanical systems. The setup is tested on a microheater constituted of a polysilicon resistor deposited on a dielectric membrane. Results concerning the temperature variations of this device are compared on one hand with simulation predictions, and on the other hand with thermoreflectance point measurements. From thermoreflectance images, we also estimate the values of the thermoreflectance coefficients of the polysilicon and of the dielectric.

Keywords

infrared imaging; micromechanical devices; temperature measurement; thermoreflectance; dielectric membrane; microelectromechanical system; microheater; noncontact imaging; polysilicon resistor; temperature variation mapping; temperature variation measurement; thermoreflectance coefficients; thermoreflectance imaging; thermoreflectance point measurements; Costs; Dielectric measurements; Light emitting diodes; Microelectromechanical systems; Micromechanical devices; Reflectivity; Spatial resolution; Temperature measurement; Thermal stresses; Thermoreflectance imaging;

fLanguage

English

Journal_Title

Electron Device Letters, IEEE

Publisher

ieee

ISSN

0741-3106

Type

jour

DOI

10.1109/LED.2004.841468

Filename

1386400