Title :
An Integrated Sensor for Electrochemical Measurements
Author :
Smith, R.L. ; Scott, D.C.
Author_Institution :
Centre Suisse d´´Electronique et de Microtechnique
Abstract :
A method for the fabrication of a completely integrated solid-state electrochemical sensor which combines a minature liquid junction reference electrode with a CMOS ISFET is presented. The reference electrode is fabricated by preferentially etching silicon to form a porous silicon frit. The CMOS process provides electrical encapsulation of the ISFET. The performance of the reference electrode and CMOS ISFET as an integrated sensor is demonstrated.
Keywords :
Biomedical electrodes; Biosensors; Chemical and biological sensors; Encapsulation; FETs; Fabrication; Integrated circuit technology; Polymer films; Silicon; Solid state circuits; Electric Conductivity; Electrochemistry; Electrodes; Silicon;
Journal_Title :
Biomedical Engineering, IEEE Transactions on
DOI :
10.1109/TBME.1986.325881
