DocumentCode
1217450
Title
Polar heterostructure for multifunction devices: theoretical studies
Author
Wu, Yuh-Renn ; Singh, Jasprit
Author_Institution
Dept. of Electr. Eng. & Comput. Sci., Univ. of Michigan, Ann Arbor, MI, USA
Volume
52
Issue
2
fYear
2005
Firstpage
284
Lastpage
293
Abstract
We examine the potential of devices based on heterostructures made from highly polar materials and semiconductors. Our calculations show that such functional devices have superior sensor properties and transistor properties. The basis device examined is based on the use of a thin oxide with high piezoelectric coefficients or pyroelectric coefficients under the gate region. Channel charge and current are controlled by gate voltage, temperature, or stress. We examine the performance of three classes of heterostructures that form the basis of important semiconductor technologies: 1) Si-SiO2-BaTiO3 heterostructure junctions that would be an important breakthrough for silicon sensor technology; 2) GaN-AlN-BaTiO3 heterostructure junctions that would be important especially in high temperature sensor application; and 3) GaAs-AlGaAs-BaTiO3 heterostructure field effect transistors. The calculations show that with a very thin polar material layer we can have a highly sensitive sensor and transistor. For optimum performance, the polar material (piezoelectric or pyroelectric) layer thickness should be ∼30 Å.
Keywords
aluminium compounds; barium compounds; field effect transistors; gallium compounds; piezoelectric devices; pyroelectric devices; semiconductor heterojunctions; silicon; silicon compounds; temperature sensors; GaAs-AlGaAs-BaTiO3; GaN-AlN-BaTiO3; Si-SiO2-BaTiO3; device simulations; heterostructure field effect transistors; heterostructure junctions; high temperature sensor application; highly polar materials; multifunction devices; piezoelectric coefficients; polar heterostructure; pyroelectric coefficients; semiconductor technologies; sensor properties; silicon sensor technology; stress sensor; thermal sensor; thin oxide; transistor properties; HEMTs; MODFETs; Piezoelectric materials; Pyroelectricity; Semiconductor materials; Silicon; Stress control; Temperature control; Temperature sensors; Voltage control;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/TED.2004.842546
Filename
1386599
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