• DocumentCode
    1218934
  • Title

    Floating-patch MEMS antennas on HRS substrate for millimetre-wave applications

  • Author

    Cho, Y.H. ; Ha, M.-L. ; Choi, W. ; Pyo, C. ; Kwon, Y.-S.

  • Author_Institution
    Sch. of Inf. & Commun. Eng., Mokwon Univ., Daejeon, South Korea
  • Volume
    41
  • Issue
    1
  • fYear
    2005
  • Firstpage
    5
  • Lastpage
    6
  • Abstract
    Novel floating-patch micro-electro-mechanical system (MEMS) antennas are proposed for millimetre-wave applications. The floating-patch MEMS antennas are fabricated on a high resistivity silicon (HRS) substrate using surface micromachining technology. Simulation and experimental results for reflection coefficients and radiation patterns are presented.
  • Keywords
    antenna radiation patterns; micromachining; micromechanical devices; microstrip antennas; microstrip lines; millimetre wave devices; Si; broadband wireless access; floating patch MEMS antennas; high resistivity silicon substrate; metallic posts; microelectromechanical system; microstrip lines; millimetre wave applications; radiation patterns; rectangular patches; reflection coefficients; surface micromachining technology;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:20057307
  • Filename
    1387765
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1218934