DocumentCode :
121928
Title :
Radiation hardness investigation of PECVD silicon carbide layers for PV applications
Author :
Huran, Jozef ; Bohacek, P. ; Kulikov, Sergey A. ; Bulavin, Maxim V. ; Sasinkova, Vlasta ; Kleinova, Angela ; Kobzev, Alexander P. ; Sekacova, M. ; Arbet, Juraj
Author_Institution :
Inst. of Electr. Eng., Bratislava, Slovakia
fYear :
2014
fDate :
8-13 June 2014
Firstpage :
1815
Lastpage :
1820
Abstract :
Amorphous silicon carbide a-SiC:H layers were deposited on P-type Si(100) substrates at various deposition conditions by means of plasma enhanced chemical vapor deposition (PECVD) technology using silane (SiH4) methane (CH4), hydrogen (H2) and argon (Ar) gases. The concentration of elements in layers was determined by Rutherford backscattering spectrometry (RBS) and elastic recoil detection (ERD) analytical method simultaneously. Chemical compositions were analyzed by Fourier transform infrared spectroscopy (FT-IR) and Raman spectroscopy. Amorphous structure of layers was verified by XRD method. Irradiation of samples by neutrons was performed at room temperature. No significance effect on the XRD spectra and IR spectra band features after neutron irradiation was observed. Intensity of Raman spectra band features was decreased after neutron irradiation. The measured currents after irradiation are greater (about 100 times) than the current before irradiation for all samples and rise up with neutron fluencies.
Keywords :
Fourier transform spectroscopy; Raman spectroscopy; X-ray diffraction; infrared spectroscopy; plasma CVD coatings; silicon compounds; solar cells; ERD analytical method; FT-IR; Fourier transform infrared spectroscopy; IR spectra band; PECVD silicon carbide layers; PECVD technology; PV applications; RBS; Raman spectra band feature intensity; Raman spectroscopy; Rutherford backscattering spectrometry; XRD spectra; elastic recoil detection; layer amorphous structure; neutron irradiation; plasma enhanced chemical vapor deposition; radiation hardness investigation; Current measurement; Neutrons; Position measurement; Radiation effects; Silicon; Silicon carbide; Substrates; SiC layer; neutron irradiation; plasma technology; structural and electrical analysis;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Photovoltaic Specialist Conference (PVSC), 2014 IEEE 40th
Conference_Location :
Denver, CO
Type :
conf
DOI :
10.1109/PVSC.2014.6925275
Filename :
6925275
Link To Document :
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