• DocumentCode
    1219779
  • Title

    Low-loss, high- Delta , single-mode channel waveguides for high-density integrated optical devices

  • Author

    Sekine, S. ; Shuto, Kazuo ; Suzuki, Satoshi

  • Author_Institution
    NTT Transmission Syst. Labs., Kanagawa, Japan
  • Volume
    25
  • Issue
    23
  • fYear
    1989
  • Firstpage
    1573
  • Lastpage
    1574
  • Abstract
    Low-loss, high- Delta , single-mode channel waveguides having cores of SiO2-Ta2O5 mixture film are successfully fabricated using sputtering and reactive ion-beam etching. Propagation loss is less than 0.6 dB/cm, and no bending loss for 500 mu m curvature radius at 1.3 mu m wavelength is achieved for an optical waveguide having a relative index difference of 5.6%.
  • Keywords
    integrated optics; optical losses; optical waveguides; optical workshop techniques; refractive index; sputter deposition; sputter etching; 0.6 dB; 1.3 micron; RIE; SiO 2-Ta 2O 5 mixture film; channel waveguides; core layer deposition; fabrication; high density devices; integrated optical devices; low loss waveguides; optical waveguide; reactive ion-beam etching; refractive index difference; single-mode; sputtering;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19891056
  • Filename
    138800
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1219779