Title :
Low-loss, high- Delta , single-mode channel waveguides for high-density integrated optical devices
Author :
Sekine, S. ; Shuto, Kazuo ; Suzuki, Satoshi
Author_Institution :
NTT Transmission Syst. Labs., Kanagawa, Japan
Abstract :
Low-loss, high- Delta , single-mode channel waveguides having cores of SiO2-Ta2O5 mixture film are successfully fabricated using sputtering and reactive ion-beam etching. Propagation loss is less than 0.6 dB/cm, and no bending loss for 500 mu m curvature radius at 1.3 mu m wavelength is achieved for an optical waveguide having a relative index difference of 5.6%.
Keywords :
integrated optics; optical losses; optical waveguides; optical workshop techniques; refractive index; sputter deposition; sputter etching; 0.6 dB; 1.3 micron; RIE; SiO 2-Ta 2O 5 mixture film; channel waveguides; core layer deposition; fabrication; high density devices; integrated optical devices; low loss waveguides; optical waveguide; reactive ion-beam etching; refractive index difference; single-mode; sputtering;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19891056
