• DocumentCode
    122044
  • Title

    Parameterization of carrier mobility sum in silicon as a function of doping, temperature and injection level: Extension to p-type silicon

  • Author

    Zheng, P. ; Rougieux, Fiacre E. ; Macdonald, Daniel ; Cuevas, Andres

  • Author_Institution
    Res. Sch. of Eng., Australian Nat. Univ., Canberra, ACT, Australia
  • fYear
    2014
  • fDate
    8-13 June 2014
  • Abstract
    Based on contactless photoconductance measurements of silicon wafers, we have determined the sum of electron and hole mobilities as a function of doping, excess carrier concentration, and temperature. By using data measured on n-type silicon wafers with resistivity from 1Ω.cm to 100Ω.cm, we have previously developed a simple mathematical expression to describe the mobility sum as a function of carrier injection, wafer doping and temperature. In this paper, we provide experimental results for p-type silicon wafers from 150K to 450K and show that they are consistent with this parameterization. We show that our parameterization of the mobility sum in silicon is valid for both p-and n-type silicon for various carrier injection, wafer doping and temperature from 150K to 450K. The new parameterization is also an experimental validation of Klaassen´s and Dorkel-Leturcq´s models under carrier injection at different temperatures.
  • Keywords
    elemental semiconductors; mathematical analysis; silicon; Dorkel-Leturcq models; Klaassen models; Si; carrier injection; carrier mobility sum parameterization; contactless photoconductance measurements; electron mobilities; hole mobilities; mathematical expression; n-type silicon wafers; p-type silicon wafers; parameterization; silicon wafers; temperature 150 K to 450 K; wafer doping; Charge carrier density; Doping; Mathematical model; Semiconductor process modeling; Silicon; Temperature dependence; Temperature measurement; charge carrier mobility; mobility sum; silicon; temperature and injection dependent;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Photovoltaic Specialist Conference (PVSC), 2014 IEEE 40th
  • Conference_Location
    Denver, CO
  • Type

    conf

  • DOI
    10.1109/PVSC.2014.6925391
  • Filename
    6925391