DocumentCode
1221273
Title
On the accuracy of a particular implementation of the Shannon-Buehler method [MOSFET mobility models]
Author
Gildenblat, Sh
Author_Institution
Dept. of Electr. Eng., Pennsylvania State Univ., University Park, PA, USA
Volume
36
Issue
9
fYear
1989
fDate
9/1/1989 12:00:00 AM
Firstpage
1857
Lastpage
1858
Abstract
The accuracy of the constant I DS-V DS version of the Shannon-Buehler method is considered. The variation of the effective mobility with gate voltage and substrate bias results in the difference between the measured and actual channel impurity profiles. General expressions that allow one to compute correction factors using different MOSFET mobility models are derived. General results are illustrated by considering two commonly used mobility models
Keywords
carrier mobility; insulated gate field effect transistors; semiconductor device models; MOSFET mobility models; Shannon-Buehler method; channel impurity profiles; correction factors; effective mobility; gate voltage; substrate bias; Dielectric constant; Dielectrics and electrical insulation; Differential equations; Genetic expression; Intrusion detection; MOSFET circuits; Semiconductor impurities; Semiconductor process modeling; Substrates; Voltage;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/16.34257
Filename
34257
Link To Document