• DocumentCode
    1221444
  • Title

    A full-color LCD addressed by poly-Si TFTs fabricated below 450°C

  • Author

    Yuki, Masanori ; Masumo, Kunio ; Kunigita, Masaya

  • Author_Institution
    Asahi Glass Co., Yokohama, Japan
  • Volume
    36
  • Issue
    9
  • fYear
    1989
  • fDate
    9/1/1989 12:00:00 AM
  • Firstpage
    1934
  • Lastpage
    1937
  • Abstract
    Poly-Si thin-film transistors (TFTs) fabricated with a maximum processing temperature of 450°C by means of laser-induced crystallization of a-Si are discussed. These devices show high mobilities (50 cm2/V-s), low threshold voltages (2 V), low off current (10-12 A), and high reliability. A 3.5-in.-diagonal full-color liquid-crystal display addressed by these poly-Si TFTs is presented
  • Keywords
    elemental semiconductors; liquid crystal displays; silicon; thin film transistors; 450 degC; Si; TFTs; full-color LCD; laser-induced crystallization; maximum processing temperature; mobilities; off current; polysilicon; reliability; threshold voltages; Annealing; Chromium; Crystallization; Fabrication; Glass; Productivity; Semiconductor lasers; Substrates; Temperature; Thin film transistors;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/16.34273
  • Filename
    34273
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1221444