Title :
Comparison of excessive Balmer α line broadening of inductively and capacitively coupled RF, microwave, and glow-discharge hydrogen plasmas with certain catalysts
Author :
Mills, Randell L. ; Ray, Paresh C. ; Nansteel, Mark ; Chen, Xuemin ; Mayo, Robert M. ; He, Jiliang ; Dhandapani, Bala
Author_Institution :
BlackLight Power Inc., Cranbury, NJ, USA
fDate :
6/1/2003 12:00:00 AM
Abstract :
From the width of the 656.3-nm Balmer α line emitted from inductively and capacitively coupled radio frequency (RF), microwave, and glow-discharge plasmas, it was found that inductively coupled RF helium-hydrogen and argon-hydrogen plasmas showed extraordinary broadening corresponding to an average hydrogen atom energy of 250-310 and 180-230 eV, respectively, compared to 30-40 and 50-60 eV, respectively, for the corresponding capacitively coupled plasmas. Microwave helium-hydrogen and argon-hydrogen plasmas showed significant broadening corresponding to an average hydrogen atom energy of 180-210 and 110-130 eV, respectively. The corresponding results from the glow-discharge plasmas were 33-38 and 30-35 eV, respectively, compared to ≈ 4 eV for plasmas of pure hydrogen, neon-hydrogen, and xenon-hydrogen maintained in any of the sources. Similarly, the average electron temperatures Te for helium-hydrogen and argon-hydrogen inductively coupled RF and microwave plasmas were high (43 200 ± 5% K, 18 600 ± 5% K, 30 500 ± 5% K, and 13 700 ± 5% K, respectively); compared to 9300 ± 5% K, 7300 ± 5% K, 8000 ± 5% K, and 6700 ± 5% K for the corresponding plasmas of xenon-hydrogen and hydrogen alone, respectively. Stark broadening or acceleration of charged species due to high electric fields cannot explain the inductively coupled RF and microwave results since the electron density was low and no high field was present. Rather, a resonant energy transfer mechanism is proposed.
Keywords :
glow discharges; high-frequency discharges; plasma diagnostics; plasma temperature; spectral line broadening; 13700 K; 180 to 230 eV; 18600 K; 250 to 310 eV; 30 to 40 eV; 30500 K; 4 eV; 43200 K; 50 to 60 eV; 656.3 nm; 6700 K; 7300 K; 8000 K; 9300 K; Balmer α line broadening; Balmer α line width; Stark broadening; average electron temperatures; average hydrogen atom energy; capacitively coupled RF plasmas; catalysts; charged species acceleration; electron density; glow-discharge hydrogen plasmas; high electric fields; inductively coupled RF helium-hydrogen plasmas; inductively coupled RF hydrogen plasmas; inductively coupled argon-hydrogen plasmas; line broadening; microwave plasmas; radiofrequency plasma; resonant energy transfer mechanism; Acceleration; Atomic measurements; Electrons; Hydrogen; Plasma accelerators; Plasma density; Plasma sources; Plasma temperature; Radio frequency; Resonance;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2003.812340