• DocumentCode
    1222322
  • Title

    Shrinking possibilities

  • Author

    Arnold, Bill

  • Volume
    46
  • Issue
    4
  • fYear
    2009
  • fDate
    4/1/2009 12:00:00 AM
  • Lastpage
    56
  • Abstract
    Lithography will need multiple strategies to keep up with the evolution of memory and logic.
  • Keywords
    integrated circuit technology; integrated logic circuits; integrated memory circuits; lithography; EUV lithography; extreme ultraviolet lithography; lithography; logic evolution; memory evolution; optical lithography; semiconductor industry; Lithography; Logic;
  • fLanguage
    English
  • Journal_Title
    Spectrum, IEEE
  • Publisher
    ieee
  • ISSN
    0018-9235
  • Type

    jour

  • DOI
    10.1109/MSPEC.2009.4808761
  • Filename
    4808761
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1222322