Author :
Dean, Robert Neal, Jr. ; Luque, Antonio
fDate :
4/1/2009 12:00:00 AM
Abstract :
The 26 papers in this special section present advances in microelectromechanical systems.
Keywords :
Chemical processes; Defense industry; Fabrication; Force feedback; Lithography; Micromechanical devices; Optical resonators; Predictive models; Sensor systems; Silicon;
Journal_Title :
Industrial Electronics, IEEE Transactions on
DOI :
10.1109/TIE.2009.2014679
