Silicon planar technology for single-photon optical detectors

Author

Sciacca, Emilio ; Giudice, Andrea C. ; Sanfilippo, Delfo ; Zappa, Franco ; Lombardo, Salvatore ; Consentino, Rosario ; Di Franco, Cinzia ; Ghioni, Massimo ; Fallica, Giorgio ; Bonanno, Giovanni ; Cova, Sergio ; Rimini, Emanuele

Author_Institution

Dept. of Phys., Univ. of Catania, Italy

Volume

50

Issue

4

fYear

2003

fDate

4/1/2003 12:00:00 AM

Firstpage

918

Lastpage

925

Abstract

Design and fabrication of single photon avalanche detector (SPAD) in planar technology is reported. Device design and critical issues in the technology are discussed. Experimental test procedures are described for dark-counting rate, afterpulsing probability, photon timing resolution, and quantum detection efficiency. Low-noise detectors are obtained, with dark counting rates down to 10 c/s for devices with 10 μm diameter, down to 1 kc/s for 50 μm diameter. The technology is suitable for monolithic integration of SPAD detectors and associated circuits.

Keywords

avalanche photodiodes; elemental semiconductors; photon counting; semiconductor device testing; silicon; 10 micron; 50 micron; SPAD; Si; afterpulsing probability; dark-counting rate; low-noise detectors; photon timing resolution; quantum detection efficiency; silicon planar technology; single photon avalanche detector; single-photon optical detectors; test procedures; CMOS technology; Cathodes; Circuit testing; Fabrication; Optical detectors; Photonics; Physics; Silicon; Solid state circuits; Timing;

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/TED.2003.812095

Filename

1206872