DocumentCode :
122361
Title :
Design and modeling of micro-glassblown inverted-wineglass structures
Author :
Senkal, Doruk ; Ahamed, Mohammed J. ; Shkel, Andrei M.
Author_Institution :
Microsyst. Lab., Univ. of California, Irvine, Irvine, CA, USA
fYear :
2014
fDate :
25-26 Feb. 2014
Firstpage :
1
Lastpage :
4
Abstract :
This paper reports analytical and finite element models for predicting the final 3-D geometry of micro-glassblown inverted-wineglass and hemi-toroidal structures from a set of initial conditions. Using these methods critical geometric param-eters for wineglass resonator and gyroscope operation, such as shell thickness, shell height, stem type (hollow/solid), and stem diameter can be estimated from initial parameters. Analytical models for first order calculation of shell height and minor radius, as well as finite element models based on Arbitrary Lagrangian-Eulerian (ALE) methods for calculating the thickness of the shell and diameter of the stem structure are presented. Developed models were validated against fabricated micro-glassblown structures and showed better than 10 % match to experimental results. Methods presented in this paper can be used to design micro-glassblown wineglass resonators with specific dimensions and resonance frequencies, essentially taking the guesswork out of the design process and significantly lowering the development time.
Keywords :
finite element analysis; geometry; gyroscopes; microfabrication; micromechanical resonators; microsensors; 3D geometry prediction; ALE method; arbitrary Lagrangian-Eulerian method; finite element model; gyroscope operation; hemitoroidal structure; microfabrication; microglassblown inverted-wineglass structure; wineglass resonator; Analytical models; Cavity resonators; Fabrication; Finite element analysis; Geometry; Glass; Micromechanical devices;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Inertial Sensors and Systems (ISISS), 2014 International Symposium on
Conference_Location :
Laguna Beach, CA
Type :
conf
DOI :
10.1109/ISISS.2014.6782501
Filename :
6782501
Link To Document :
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