Title :
A Multichannel Depth Probe Fabricated Using Electron-Beam Lithography
Author :
Pochay, Phillip ; Wise, Kensall D. ; Allard, Lawrence F. ; Rutledge, Lester T.
Author_Institution :
Biophysics Program, Department of Electrical and Computer Engineering, University of Michigan
fDate :
4/1/1979 12:00:00 AM
Abstract :
A multielectrode probe structure is described in which several thin-film metal electrodes are defined on the outer surface of a glass micropipette using electron-beam lithography. Electrode geometries are controlled to within one micron, resulting in electrode recording characteristics which are extremely well matched. Recording sites are 5 , um wide rings spaced 100 , um apart in depth. Analysis and characterization show the structure to be capable of accurately recording tissue potentials with a minimum of tissue damage. Use of these probes in current source-density (CSD) analysis of extraceliular current flow is described.
Keywords :
Coatings; Electrodes; Electrons; Glass; Lithography; Metallization; Microelectrodes; Probes; Resists; Tissue damage; Electric Conductivity; Electroencephalography; Electron Probe Microanalysis; Electrons; Engraving and Engravings; Methylmethacrylates; Microelectrodes; Polymers;
Journal_Title :
Biomedical Engineering, IEEE Transactions on
DOI :
10.1109/TBME.1979.326558
